CNS Nanofabrication Summer School - Reactive Ion Etch (RIE)

Hello All CNS Colleagues,

At this Friday’s nanofabrication tutorial, I will talk about Reactive Ion Etch (RIE), the topics include:

·         Reactive ion etch mechanisms

·         High aspect ratio etch

·         Crystal direction dependent etch

·         Angled-etch

Where: Geo Haller Hall, 24 Oxford Street, Cambridge

When: July 6, 12:00pm – 1:00pm.

Food served: Pizza